JPS6329802U - - Google Patents
Info
- Publication number
- JPS6329802U JPS6329802U JP1986124334U JP12433486U JPS6329802U JP S6329802 U JPS6329802 U JP S6329802U JP 1986124334 U JP1986124334 U JP 1986124334U JP 12433486 U JP12433486 U JP 12433486U JP S6329802 U JPS6329802 U JP S6329802U
- Authority
- JP
- Japan
- Prior art keywords
- light
- light source
- irradiated
- mask
- projection lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986124334U JPS6329802U (en]) | 1986-08-13 | 1986-08-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986124334U JPS6329802U (en]) | 1986-08-13 | 1986-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6329802U true JPS6329802U (en]) | 1988-02-26 |
Family
ID=31016253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986124334U Pending JPS6329802U (en]) | 1986-08-13 | 1986-08-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6329802U (en]) |
-
1986
- 1986-08-13 JP JP1986124334U patent/JPS6329802U/ja active Pending